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  • Accuracy SPEC
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1. HEAT DEFORMATION CORRECTION and HIGH SIZE TOLERANCE SYSTEM

Realize HIGHEST DIMENSIONAL ACCURACY
  • SIZE TOLERANCE 10 MICRON Class
  • Repeatability ¡¾ 0.002(24 hours)
  • Cpk 1.67 guaranteed( Datum tolerance 0.05)
  • Accuracy of stroke end measured for compensating HEAT DEFORMATION and Slide TRAVEL Accuracy

System Logic



System Flow Chart



Construction



Details of Measurement of Travel End